Products
Wafer Cleaner
Streamlined and effective cleaning solutions to bolster your operations. The ADT 977 Wafer Cleaner Systems are meticulously crafted for the purpose of cleaning workpieces subsequent to the dicing process.
Equipped with adjustable rotating cleaning arm with atomizing or high pressure cleaning nozzles to cope with wide range of cleanliness requirements
Streamlined and effective cleaning solutions to bolster your operations. The ADT 977 Wafer Cleaner Systems are meticulously crafted for the purpose of cleaning workpieces subsequent to the dicing process.
Equipped with adjustable rotating cleaning arm with atomizing or high pressure cleaning nozzles to cope with wide range of cleanliness requirements
| 977 | 977L | |
| Max. workpiece size | Ø 8″ | Ø 12″ or 12″x12″ square |
| Cleaning method | Atomizing cleaning / High pressure cleaning | |
| Number of recipes that can be saved | 20 | |
| Spinner velocity range | 200–3000 rpm | 200–2500 rpm |
| Machine dimensions (WxDxH) | 410 x 625 x 946 mm | 570 x1250 x 1073 mm |
| Approx. machine weight | 120Kg | 200Kg |
Industry accumulation and succession
Core components · Autonomous control
Local research and development · Accumulate steadily
GL Tech Official Douyin Account
GL Tech Official WeChat Account
